JPH0448265U - - Google Patents
Info
- Publication number
- JPH0448265U JPH0448265U JP8901790U JP8901790U JPH0448265U JP H0448265 U JPH0448265 U JP H0448265U JP 8901790 U JP8901790 U JP 8901790U JP 8901790 U JP8901790 U JP 8901790U JP H0448265 U JPH0448265 U JP H0448265U
- Authority
- JP
- Japan
- Prior art keywords
- cylindrical body
- glow discharge
- discharge decomposition
- conductive film
- decomposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8901790U JPH0448265U (en]) | 1990-08-23 | 1990-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8901790U JPH0448265U (en]) | 1990-08-23 | 1990-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448265U true JPH0448265U (en]) | 1992-04-23 |
Family
ID=31822708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8901790U Pending JPH0448265U (en]) | 1990-08-23 | 1990-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448265U (en]) |
-
1990
- 1990-08-23 JP JP8901790U patent/JPH0448265U/ja active Pending